Author:
Vora K. D.,Shew B.-Y.,Lochel B.,Harvey E. C.,Hayes J. P.,Peele A. G.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Thick SU8 microstructures prepared by broadband UV lithography and the applications in MEMS devices;Optoelectronics Letters;2016-05
2. Micromanufacturing: A review—Part I;Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture;2014-08-01