Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. Ballestra A, Soma A, Pavanello R (2008) Experimental-numerical comparison of the cantilever MEMS frequency shifts in presence of a residual stress gradient. Sensors 8:767–783
2. Bao M (2005) Analysis and design principles of MEMS devices. Elsevier, Amsterdam
3. Chaker M, Boily S, Diawara Y, EI Khakani MA, Gat E, Jean A, lafontaine H, Pepin H, Voyer J, Kieffer JC (1992) X-ray mask development based on SiC membrane and W absorber. J Vac Sci Technol B 10:3191–3195. https://doi.org/10.1116/1.585910
4. Chen KS (2006) Techniques in residual stress measurement for MEMS and their applications. In: Leondes CT (ed) MEMS/NEMS. Springer, Boston. https://doi.org/10.1007/0-387-25786-1_33
5. Chen W-F, Atsuta T (1977) Theory of beam-columns: space behavior and design, vol 2. J. Ross Publishing, New York
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献