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Gold-based thin multilayers for ohmic contacts in RF-MEMS switches

  • Published:2012-01-06 Issue:7-8 Volume:18 Page:965-971
  • ISSN:0946-7076
  • Container-title:Microsystem Technologies
  • language:en
  • Short-container-title:Microsyst Technol

Author:

Mulloni V.,Iannacci J.,Bartali R.,Micheli V.,Colpo S.,Laidani N.,Margesin B.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Comprehensive Review of RF MEMS Switches in Satellite Communications;Sensors;2024-05-15

2. A Mini Review on MEMS Switches: Design, Fabrication, and Applications;2023 3rd International Conference on Energy, Power and Electrical Engineering (EPEE);2023-09-15

3. Revolutionizing wireless communication: A review perspective on design and optimization of RF MEMS switches;Microelectronics Journal;2023-09

4. Review on Switches for Power Applications: Macro to Micro;Recent Advances in Electrical & Electronic Engineering (Formerly Recent Patents on Electrical & Electronic Engineering);2019-06-10

5. RF-MEMS technology as an enabler of 5G: Low-loss ohmic switch tested up to 110 GHz;Sensors and Actuators A: Physical;2018-08
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