Characterization and modeling of electro-thermal MEMS structures

Author:

Szabó Péter Gábor,Székely Vladimír

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Modelling and Characterization of an Electro-Thermal MEMS Device for Gas Property Determination;2023 Smart Systems Integration Conference and Exhibition (SSI);2023-03-28

2. Thermopile-based THz antenna;Microsystem Technologies;2011-12-03

3. THz detection by modified thermopile;SPIE Proceedings;2011-05-04

4. Investigation of parallel heat flow path in electro-thermal microsystems;Microsystem Technologies;2011-01-23

5. Dynamic modelling for thermal micro-actuators using thermal networks;International Journal of Thermal Sciences;2010-11

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