Design, fabrication and characterization of laser patterned LTCC micro hotplate with stable interconnects for gas sensor platform

Author:

Kharbanda D. K.,Suri N.,Khanna P. K.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Cai Z, Li X, Hu Q, Zeng X (2009) Fabrication of microheater by laser micro cladding electronic paste. Mater Sci Eng B 157:15–19

2. Denk I, Ingrisch K, Weigold T, Baumann H, Weiblen K, Zeppenfeld B, Schumann B (1999) New CO/NOx-sensor system for automotive climate control in a small-size housing with high mounting flexibility. In: SENSOR 99 Proceedings, Nürnberg, pp 339–344

3. Jain YK, Khanna VK (2007) Thick film, LTCC or silicon microhotplate for gas sensor and other applications. In: International Workshop Physics and Semiconductor Devices, pp 714–717

4. Kharbanda D, Khanna PK (2012) Design, simulation and modelling of LTCC based micro hotplate for gas sensor applications. In: IEEE conference proceedings, International Symposium on Physics and Technology of Sensors

5. Kita Jaroslaw, Dziedzic Andrzej, Golonka Leszek J, Bochenek Andrzej (2000) Properties of laser cut LTCC heaters. Microelectron Reliab 40:1005–1010

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