Author:
Bedenbecker M.,Bandorf R.,Bräuer G.,Lüthje H.,Gatzen H. H.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Bandorf R, Bloche A, Ortner K, Jung T (2007a) High rate deposition of soft magnetic thick films by gas flow sputtering. Proceedings of 50th Annual Conference of Society of Vacuum Coaters, Louisville, 477–479
2. Bandorf R, Bloche A, Ortner K, Lüthje H, Jung T (2007b) High rate deposition of magnetic material by gas flow sputtering. Plasma Process Polym 4:129–133
3. Bedenbecker M, Gatzen HH (2006) Electroplated CoFe thin films for electromagnetic microactuators. J Appl Phys 99:08M308
4. Budde T, Gatzen HH (2006) Thin film SmCo magnets for use in electromagnetic microactuators. J Appl Phys 99:08N304
5. Budde T, Hahn M, Föhse M, Edler J, Stölting H-D, Gatzen HH (2004) Design, fabrication, and characterization of a hybrid linear micro step motor. Proceedings of Actuators 2004, Bremen, pp. 665–668
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