Author:
Kifle Teweldebrhan,Chandra Sudhir,Koul S. K.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference27 articles.
1. Ahn CH, Allen MG (1998) Micromachined planar inductors on silicon wafers for MEMS applications. IEEE Trans Ind Electron 45(6):866–876
2. Burghartz JN, Rejaei B (2003) On the design of RF spiral inductors on silicon. IEEE Trans Electron Devices 50(3), March 2003, Invited Paper
3. Carazzetti P (2006) High Quality Micromachined Inductors”, Institute of Microtechnology University of Neuchtel, Ph.D thesis, 2006 for Integrated Communication Systems
4. Chua CL, Fork DK, Van Schuylenbergh K, Lu JL (2003) High-Q RF coils on silicon integrated circuits. Proc SPIE 4981:150–155
5. Dai CL, Hong JY, Liu MC (2008) Hight Q-factor CMOS MEMS inductor. DTIP of MEMS and MOEMS, pp 9–11, April 2008
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献