Author:
Keramati Hamed,Chan Weng-Kong,Miao Jianmin
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference27 articles.
1. Chuang YJ, Tseng FG, Lin WK (2002) Reduction of diffraction effect of UV exposure on SU-8 negative thick photoresist by air gap elimination. Microsyst Technol 8(4):308–313
2. Epstein AH (2003) Millimeter-scale, mems gas turbine engines. In: Proceedings of ASME turbo expo 2003 power for land, sea, and air, Atlanta, USA, vol. 1, pp. 1–28
3. Fréchette LG, Jacobson SA, Ehrich FF, Ghodssi R, Khanna R, Wong CW, Zhang X, Schmidt MA, Epstein AH (2000) Demonstration of a microfabricated high-speed turbine supported on gas bearings. In: Proceedings of the 2000 solid state sensor and actuator workshop, Hilton Head Island SC, pp. 43–47, June 2000
4. Grimes R, Walsh EJ, Quin D, Davies MRD (2005) Effect of geometric scaling on aerodynamic performance. AIAA J 43(11):2293–2298
5. Hsu CP et al (2007) Miniaturization of electrostatic fluid accelerators. J Microelectromech Syst 16(4):809–815
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献