Electromagnetically actuated biaxial scanning micromirror fabricated with silicon on glass wafer-Reference-Cited by-同舟云学术

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Electromagnetically actuated biaxial scanning micromirror fabricated with silicon on glass wafer

Published:2016-05-02 Issue:6 Volume:23 Page:2075-2085
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Kim Jun-Ho,Jeong Haesoo,Lee Seung-Ki,Ji Chang-Hyeon,Park Jae-Hyoung

Funder

National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT and Future Planning (MSIP)

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-016-2949-5.pdf

Reference22 articles.

1. Aoyagi I, Shimaoka K, Kato S, Makishi W, Kawai Y, Tanaka S, Ono T, Esashi M, Hane K (2011) 2-axis MEMS scanner for a laser range finder. In: Proceedings of IEEE International Conference on Optical MEMS and Nanophotonics, pp 39–40

2. Ataman C, Lani S, Noell W, de Rooij N (2013) A dual-axis pointing mirror with moving-magnet actuation. J Micromech Microeng 23:025002

3. Bogatscher S, Streck A, Heussner N, Fox M, Meinzer S, Stork W (2014) Large aperture at low cost three-dimensional time-of-flight range sensor using scanning micromirrors and synchronous detector switching. Appl Optics 53:1570–1582

4. Ehlert D, Adamek R, Horn HJ (2009) Laser rangefinder-based measuring of crop biomass under field conditions Precis. Agric 10:395–408

5. Glennie CL, Carter WE, Shrestha RL, Dietrich WE (2013) Geodetic imaging with airborne LiDAR: the Earth’s surface revealed. Rep Prog Phys 76:086801

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