Kinematic design of a redundant parallel mechanism for maskless lithography optical instrument manipulations-Reference-Cited by-同舟云学术

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Kinematic design of a redundant parallel mechanism for maskless lithography optical instrument manipulations

Published:2014-05-06 Issue:8-9 Volume:20 Page:1479-1490
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Ihn Yong Seok,Ji Sang-Hoon,Moon Hyungpil,Choi Hyouk Ryeol,Koo Ja Choon

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-014-2145-4.pdf

Reference20 articles.

1. Binnig G, Rohrer H, Gerber C, Weibel E (1982) Surface studies by scanning tunneling microscopy. Phys Rev Lett 49:57–61

2. Chen M-Y, Huang H-H, Hung S-K (2010) A new design of a submicropositioner utilizing electromagnetic actuators and flexure mechanism. Ind Electron IEEE Trans 57(1):96–106

3. Franklin N, Wang Q, Tombler T, Javey A, Shim M, Dai H (2002) Integration of suspended carbon nanotube arrays into electronic devices and electromechanical systems. Appl Phys Lett 81(5):913–915

4. Ihn YS, Kim Y, Choi H, Lee S, Koo J (2009) Implementation of graspless handling system for microparticles using AFM probe. In: Proceedings of the 2009 IEEE/RSJ International conference on intelligent robots and systems, pp 1843–1848

5. Kar I, Behera L (2009) Visual motor control of a 7 DOF robot manipulator using a fuzzy SOM network. Intel Serv Robot 3(1):49–60

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Review of Redundant Parallel Kinematic Mechanisms;Journal of Intelligent & Robotic Systems;2016-10-10

2. Two-DOF actuator module design and development based on fully decoupled parallel structure;Microsystem Technologies;2016-07-02

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