Effect of die attachment on key dynamical parameters of micromachined gyroscopes

Author:

Hou Zhanqiang,Xiao Dingbang,Wu Xuezhong,Su Jianbin,Chen Zhihua,Zhang Xu

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference30 articles.

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2. Bae SY, Hayworth KJ, Yee KY, Shcheglov K, Wiberg DV (2002) High performance MEMS micro-gyroscope. Design, Test, Integration, and Packaging of MEMS/MOEMS 4755:316–324

3. Dixon RH (2006) Markets and applications for MEMS inertial sensors. Proceedings of SPIE 6113:611306

4. Ferguson M I, Keymeulen D, Peay C, Yee K (2005) Effect of temperature on MEMS vibratory rate gyroscope. In: Proceedings of IEEE conferences, pp 1–6

5. Foulgoc BL, Bourouina T, Traon OL, Bosseboeuf A, Marty F, Breluzeau C, Grandchamp J, Masson S (2006) Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor. J Micromech Microeng 16:S45–S53

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