Design, fabrication and testing of sandwich coupled inductors
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://link.springer.com/content/pdf/10.1007/s00542-012-1504-2.pdf
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5. Jiang H, Yoo K, Yeh JA, Li Z (2002) Fabrication of thick silicon dioxide sacrificial and isolation blocks in a silicon substrate. J Micromech Microeng 12:87–95
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