An integrated approach for validating micro mechanical systems based on simulation and test-Reference-Cited by-同舟云学术

An integrated approach for validating micro mechanical systems based on simulation and test

Published:2008-05-14 Issue:12 Volume:14 Page:1781-1787
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Albers Albert,Deigendesch Tobias,Enkler Hans-Georg,Hauser Stefan,Leslabay Pablo,Oerding Jochen

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-008-0615-2.pdf

Reference10 articles.

1. Albers A, Burkardt N, Deigendesch T, Ellmer C, Hauser S (2007a) Validation of micromechanical systems, Int. Workshop on high-aspect-ratio micro-structure technology HARMST, Besancon, France, 7–9 June 2007

2. Albers A, Enkler H-G, Leslabay P, (2007b) On the simulation of molded micro components and systems, Int. Workshop on high-aspect-ratio micro-structure technology HARMST, Besancon, France, 7–9 June 2007

3. Marz J (2005) Mikrospezifischer produktentwicklungsprozess (μPEP) für werkzeuggebundene Mikrotechniken. Dissertation, IPEK Forschungsberichte Bd. 17, 2005

4. Mitutoyo Messgeräte GmbH (2007) Neuss, Germany. http://www.mitutoyo.de . Accessed 31 July 2007

5. Normenausschuss Feinmechanik und Optik (NaFuO) (1972a) Im DIN Deutsches Institut für Normung e.V. IN 58405: Stirnradgetriebe der Feinwerktechnik. Beuth Verlag, Berlin

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