Author:
Song Zhaohui,Sun Teng,Wu Jian,Che Lufeng
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Bernstein J, Miller R, Kelley W, Ward P (1999) Low-noise MEMS vibration sensor for geophysical applications. J Microelectromech Syst 8(4):433–438
2. Kraft M (1997) Closed-loop accelerometer employing oversampling conversion. PhD thesis. Coventry University
3. van Kampen R, Wolffenbuttel R (1992) A critically-damped integrated capacitive accelerometer using feedback of position and velocity. ISCAS’92 Proceedings
4. Wakker K (1995) Bulk-micromachined capacitive servo-accelerometer. Delft University Press, Delft
5. Wu J, Carley L (2006) Electromechanical modulation with high-Q micromechanical accelerometer and pulse density modulated force feedback. IEEE Trans Circuits Syst I 53(2):274–287
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