Author:
Ito R.,Wakui M.,Sameshima H.,Hu F.-R.,Hane K.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
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2. Design, fabrication, and optical characteristics of freestanding GaN waveguides on silicon substrate;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-05
3. Design and fabrication of GaN crystal ultra-small lateral comb-drive actuators;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-01
4. Fabrication of GaN light emitting diode membrane on Si substrate for MEMS applications;Microsystem Technologies;2010-10-06