Usage of porous Al2O3 layers for RH sensing

Author:

Timár-Horváth Veronika,Juhász László,Vass-Várnai András,Perlaky Gergely

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Banerjee G, Sengupta K (2002) Pore size optimisation of humidity sensor—a probabilistic approach. Sens Actuators B 86:34–41

2. Brunauer S, Emmett PH, Teller E (1938) Adsorption of gases in multimolecular layers. J Am Chem Soc 60:309. doi: 10.1021/ja01269a023

3. Dai CL (2006) A capacitive humidity sensor integrated with micro heater and ring oscillator circuit fabricated by CMOS-MEMS technique. Sens Actuators B 122(2):375–380

4. Gregg SJ (1961) The surface chemistry of solids. Chapman & Hall, London, pp 28–82

5. Losonci I, Pető C, Tihanyi K (1982) Galvanotechnikai zsebkönyv, (Pocket-book of galvanotechnology—in Hungarian). Műszaki Kiadó, Budapest, p. 395

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