Author:
Zhi Chao,Shinshi Tadahiko,Uehara Minoru,Matsutani Akihiro,Yuito Isamu,Takeuchi Teruaki
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference25 articles.
1. Arnold DP, Wang N (2009) Permanent magnets for MEMS. J Microelectromechanical Syst 18(6):1255–1266. doi: 10.1109/JMEMS.2009.2034389
2. Behkam B, Sitti M (2008) Bacterial propulsion of chemically patterned micro-cylinders. IEEE/RAS-EMBS Int Conf Biomed Robot Biomechatronics BioRob 753–757. doi: 10.1109/BIOROB.2008.4762892
3. Chang FI, Yeh R, Lin G, Chu PB, Hoffman E, Kruglick EJJ, Pister KSJ (1995) Gas-phase silicon micromachining with xenon difluoride. Proc SPIE 2641:117–128. doi: 10.1117/12.220933
4. Dempsey NM, Walther A, May F, Givord D, Khlopkov K (2007) High performance hard magnetic NdFeB thick films for integration into micro-electro-mechanical systems. J Appl Phys 90:092509. doi: 10.1063/1.2710771
5. Guan S, Nelson BJ (2005) Electrodeposition of low residual stress CoNiMnP hard magnetic thin films for magnetic MEMS actuators. J Magn Magn Mater 292:49–58. doi: 10.1016/j.jmmm.2004.10.094
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