Realization of a capacitive shunt RF-MEMS switch using straight flexure based non-uniform bridge structure-fabrication and characterization-Reference-Cited by-同舟云学术

Realization of a capacitive shunt RF-MEMS switch using straight flexure based non-uniform bridge structure-fabrication and characterization

Published:2020-07-27 Issue:5 Volume:27 Page:2021-2026
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Angira Mahesh,Bansal Deepak

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://link.springer.com/content/pdf/10.1007/s00542-020-04974-8.pdf

Reference13 articles.

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2. Angira M, Bansal D, Kumar P, Mehta K, Rangra K (2019) A novel capacitive RF-MEMS switch for multi-frequency operation. Superlattices Microstruct 133:106204–106211

3. Chu C, Liao X, Yan H (2017) Ka-band RF MEMS capacitive switch with low loss, high isolation, long-term reliability and high power handling based on GaAs MMIC technology. IET Microw Antennas Propag 11:942–948

4. Dorin P (2006) IEEE Eng Med Biol Mag 5:19–28

5. Entesari K (2006) Development of high performance 6–18 GHz tunable/switchable RF MEMS filters and their system implications. Ph.D. Thesis, University of Michigan, Michigan

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2. Investigation on Switching Structure Geometries and their Impact on Electromagnetic Response of RF-MEMS Capacitive Switch;2022 2nd Asian Conference on Innovation in Technology (ASIANCON);2022-08-26