Coupling element effect on support loss of coupled oscillators for mass and analyte sensing applications-Reference-Cited by-同舟云学术

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Coupling element effect on support loss of coupled oscillators for mass and analyte sensing applications

Published:2022-05-14 Issue:7 Volume:28 Page:1663-1671
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Wang Rong,Wang Dong F.^ORCID,Xia Cao,Feng Haonan,Wang Xin

Funder

National Natural Science Foundation of China

Natural Science Foundation of Jilin Province

Scientific Research Foundation for Leading Professor Program of Jilin University

Graduate Innovation Fund of Jilin University

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://link.springer.com/content/pdf/10.1007/s00542-022-05308-6.pdf

Reference38 articles.

1. Ashok A, Kumal PM, Singh SS et al (2018) Achieving wideband micromechanical system using coupled non-uniform beams array. Sens Actuator, A 273:12–18. https://doi.org/10.1016/j.sna.2018.02.008

2. Bao M, Yang H (2007) Squeeze film air damping in MEMS. Sens Actuators A Phys 136(1):3–27. https://doi.org/10.1016/j.sna.2007.01.008

3. Bindel DS, Govindjee S (2005) Elastic PMLs for resonator support loss simulation. Int J Numer Methods Eng 64(6):789–818. https://doi.org/10.1002/nme.1394

4. Chaste J, Eichler A, Moser J, Ceballos G, Rurali R, Bachtold A (2012) A nanomechanical mass sensor with yoctogram resolution. Nat Nanotechnol 7(5):301–304. https://doi.org/10.1038/NNANO.2012.42

5. Clark JR, Hsu WT, Abdelmoneum MA, Nguyen CC (2005) High-Q UHF micromechanical radial-contour mode disk resonators. J Microelectromech Syst 14(6):1298–1310. https://doi.org/10.1109/JMEMS.2005.856675

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