Author:
Pan C. T.,Yang T. L.,Su C. Y.,Chao C. H.,Wang Z. K.,Shen S. C.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference35 articles.
1. Alley RL, Mai P, Komvopolous K, Howe RT (1993) Surface roughness modification of interfacial contacts in polysilicon microstructures. Paper presented at the 7th Int. Conf. Solid-State Sensors and Actuators (Transducers ‘93), Yokohama, Japan
2. Anguita J, Briones F (1998) HF/H2O vapor etching of SiO2 sacrificial layer for large-area surface-micromachined membranes. Sens Actuators A 64:247–251
3. Ashurst WR, Yau C, Carraro C, Lee C, Kluth GJ, Howe RT, Maboudian R (2001) Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS. Sens Actuators A 91:239–248
4. Beck M, Graczyk M, Maximov I, Sarwe EL, Ling TGI, Keil M, Montelius L (2002) Improving stamps for 10 nm level wafer scale nanoimprint lithography. Microelectron Eng 61–62:441–448
5. Bunker BC et al (2000) The impact of solution agglomeration on the deposition of self-assembled monolayers. Langmuir 16:7742–7751
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