Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference30 articles.
1. Attar A, Fathalilou M, Rezazadeh G (2019) Mechanical behavior of a cylindrical capacitive micro-switch compared to a straight beam type. J Mech Sci Technol 33:2241–2248
2. Bao M, Wang W (1996) Future of microelectromechanical systems (MEMS). Sens Actuators A Phys 56:135–141
3. Batra RC, Porfiri M, Spinello D (2007) Review of modeling electrostatically actuated microelectromechanical systems. Smart Mater Struct 16:23–31
4. Becher D, Chan R, Hattendorf M, Feng M (2002) Reliability study of low-voltage RF MEMS switches. In: Proceedings of GaAs Mantech, pp 7–54
5. Beer FP, Johnston ER (2004) Mechanics of materials, 3rd edn. McGrawHill, New York
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献