1. Ahn CH, Allen MG (1995) Fluid micropumps based on rotatory magnetic actuator. IEEE 8th international workshop on MEMS, pp 408–412
2. Deng K, Dewa AS, Ritter DC, Bonham C, Guckel H (1998) Characterization of gear pumps fabricated by LIGA. Microsyst Technol 4:163–167
3. Döpper J, Clemens M, Ehrfeld W, Jung S, Kämper K-P, Lehr H (1997) Micro gear pumps for dosing of viscous fluids. J Micromech Microeng 7:230–232
4. Feldmann M, Büttgenbach S (2004). Novel monolithical micro plunger coil actuator using polymer magnets and double layer micro coils. Proceedings of the XVIII. Eurosensors, pp 34–35
5. Feldmann M, Büttgenbach S (2005) Novel fabrication processes for polymer magnets and their utilization to design versatile electromagnetic micro actuators. Proceedings of the Eurosensors, p. WC6f