1. Bhaskar K, Varadan TK (2013) Plates: theories and applications. Ane Books Pvt. Ltd, New Delhi
2. Chen D, Cui D, Wang L, Gao X (2002) SiN beam resonant pressure sensors with a novel structure. In: Proceedings of 2002 IEEE sensors international conference, vol 2. pp 994–997
3. Chen D, Cui D, Xia S, Cui Z (2005) Design and modelling of a silicon nitride beam resonant pressure sensor for temperature compensation. In: Proceedings IEEE international conference information acquisition, Hong Kong and Macau, pp 239–242
4. Chen D, Wu Z, Shi X, Wang J, Liu L (2009) Design and modelling of an electromagnetically excited silicon nitride beam resonant pressure sensor. In: Proceedings 4th IEEE international conference nano/micro engineered and molecular systems, Shenzhen, pp 754–757
5. Chuan Y, Can G (2010) Investigation based on MEMS double Si3N4 resonant beams pressure sensor. In: Proceedings 5th IEEE international conference nano/micro engineered and molecular systems (NEMS), Xiamen, pp 5–8