Mechanical behavior of a circular micro plate subjected to uniform hydrostatic and non-uniform electrostatic pressure

Author:

Nabian Adel,Rezazadeh Ghader,Haddad-derafshi Mohammadali,Tahmasebi Ahmadali

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Gupta RK (1993) Electrostatic pull-in test structure design for in-situ mechanical property measurement of microelectromechanical systems (MEMS). Thesis for degree of Doctor of Philosophy, S. M. Massachusetts Institute of Technology

2. Michalicek MA, Comtois JH, Schriner HK (1998) Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process. Proc SPIE 3276:48–55

3. Nathanson HC, Newell WE, Wickstrom RA, Davis JR (1967) The resonant gate transistor. IEEE Trans Elect Devices 14:117–133

4. Osterberg P (1995) Electrostatically actuated microelectromechanical test structures for material property measurement. PhD thesis, MIT

5. Rezazadeh Gh, Tahmasebi A (2006) Eliminating of the residual stresses effect in the fixed-fixed end type MEM switches by piezoelectric layers. J Sens Transducers 66(4):534–542

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