Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology-Reference-Cited by-同舟云学术

Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology

Published:2014-01-29 Issue:3 Volume:21 Page:699-706
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Pham Phuc Hong,Dinh Toan Khac,Dang Lam Bao,Nguyen Khoa Tuan,Dao Dzung Viet

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-014-2086-y.pdf

Reference16 articles.

1. Allen JJ, Schriner HK (1998) Micromachine wedge stepping motor. In: ASME international mechanical engineering congress and expositions-MEMS symposia, Anaheim

2. Barnes SM, Miller SL, Rodgers MS, Bitsie F (2000) Torsional ratcheting actuating system. In: Modeling and simulation of microsystems 2000, San Diego

3. Chu J, Zhang R, Cheng Z (2011) A novel SU-8 electrothermal microgripper based on the type synthesis of the kinematic chain method and the stiffness matrix method. J Micromech Microeng 21:15

4. Garcia EI, Sniegowski JJ (1995) Surface micromachined microengine as the driver for micromechanical gears. Transducers’95, Stockholm, pp 365–68

5. Hayashi T (1994) Micromechanisms and their characteristics. In: Proceedings IEEE Workshop on MEMS ‘94, ISBN 0-7803-1833-1, pp 39–44

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Single mask and low voltage electrothermal micromotor;Sensors and Actuators A: Physical;2024-08

2. Microactuators;Smart Sensors and MEMs;2018

3. Development of new electrostatic micro cam system driven by elastic wings;Microsystem Technologies;2017-04-22

4. A micro transmission system based on SOI-MEMS technology: improvement and characteristics;Microsystem Technologies;2016-06-16