Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology

Author:

Pham Phuc Hong,Dinh Toan Khac,Dang Lam Bao,Nguyen Khoa Tuan,Dao Dzung Viet

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference16 articles.

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2. Barnes SM, Miller SL, Rodgers MS, Bitsie F (2000) Torsional ratcheting actuating system. In: Modeling and simulation of microsystems 2000, San Diego

3. Chu J, Zhang R, Cheng Z (2011) A novel SU-8 electrothermal microgripper based on the type synthesis of the kinematic chain method and the stiffness matrix method. J Micromech Microeng 21:15

4. Garcia EI, Sniegowski JJ (1995) Surface micromachined microengine as the driver for micromechanical gears. Transducers’95, Stockholm, pp 365–68

5. Hayashi T (1994) Micromechanisms and their characteristics. In: Proceedings IEEE Workshop on MEMS ‘94, ISBN 0-7803-1833-1, pp 39–44

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