Author:
Liu Jing-Quan,Sun Hong-Wen,Li Ling-Han,Chen Di
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Lorenz H (1998) High-aspect ratio, ultrathick, negative-tone near-UV photoresist and its application for MEMS. Sensor Actuator A 64:33–39
2. Basrour S, Majjad H, Coudevylle JR, de Labachelerie M (2001) Design and test of new high Q microresonators fabricated by UV-LIGA Design. Test, Integration, and Packaging of MEMS/MOEMS 2001
3. Shan XC, Maedab R, Ikehara T, Mekaruc H, Hattori T (2003) Fabrication of X-ray masks and applications for optical switch molding. Sensor Actuator A 108:224–229
4. Ruey F (2002) Fabrication of integrated microlens array mold and mold insert for mass production. MEMS/MOEMS Technologies and Applications. SPIE 4928:85–92
5. Taguchi G (1962) Tables of orthogonal arrays and linear graphs. Tokyo
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