Author:
Hoang Kien Trung,Nguyen Dzung Tien,Pham Phuc Hong
Funder
National Foundation for Science and Technology Development
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Bullis WM, Brewer FH, Kolstad CD, Swartzendruber LJ (1968) Temperature coefficient of resistivity of silicon and germanium near room temperature. Solid-State Electron 11(7):639–646
2. Chiorean R-S (2015) Electro-thermo-mechanical modeling of V-beam actuators. Proc Technol 19:56–61
3. Enikov ET, Kedar SS, Lazarov KV (2004) Analytical and experimental analysis of folded beam and V-shaped thermal microactuators. In: SEM 10th international congress expo. Costa Mesa, California
4. Espinosa HD, Zhu Y, Moldovan N (2007) Design and operation of a MEMS-based material testing system for nanomechanical characterization. J Microelectromech Syst 16(5):1219–1231
5. Geisberger A, Kadylak D, Ellis M (2006) A silicon electrothermal rotational micro motor measuring one cubic millimeter. J Micromech Microeng 16(10):1943–1950
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