Author:
You Jianliang,Packirisamy Muthukumaran,Stiharu Ion
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Zhang XM, Chau FS, Quan C, Lam YL, Liu AQ (2001) A study of the static characteristics of a torsional micromirror. Sens Actuators A 90:73–81
2. Hsieh J, Fang WL (2000) A novel microelectrostatic torsional actuator. Sens Actuators 79:64–70
3. Kamiya D, Gozu T, Horie M (2005) Design and manufacturing of micromechanism elements of 2-DOF micromanipulator. Microsyst Technol 11:1013–1019
4. Yoon YS, Bae KD, Kim JH, Choi H (2003) A low voltage actuated micromirror with an extra vertical electrode for 90° rotation. J Micromech Microeng 13:922–926
5. Fedder G (1994) Simulation of micro-electro-mechanical systems, PhD Dissertation, University of California at Berkeley
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献