A simple method for shape modulation in microlens array fabrication via spin-coating process-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

A simple method for shape modulation in microlens array fabrication via spin-coating process

Published:2017-10-20 Issue:4 Volume:24 Page:1885-1889
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Huang Shengzhou,Li Mujun,Shen Lianguan,Qiu Jinfeng,Zhou Youquan

Funder

Chinese National Natural Science Foundation

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/article/10.1007/s00542-017-3571-x/fulltext.html

Reference25 articles.

1. Albero J, Nieradko L, Gorecki C, Ottevaere H, Gomez V, Thienpont H, Pietarinen J, Päivänranta B, Passilly N (2009) Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques. Opt Express 17:6283–6292

2. Bian R, Xiong Y, Chen X, Xiong P, Hou S, Chen S, Zhang X, Liu G, Tian Y (2015) Ultralong focal length microlens array fabricated based on SU-8 photoresist. Appl Opt 54:5088–5093

3. Bitterli R, Scharf T, Herzig H-P, Noell W, de Rooij N, Bich A, Roth S, Weible KJ, Voelkel R, Zimmermann M (2010) Fabrication and characterization of linear diffusers based on concave micro lens arrays. Opt Express 18:14251–14261

4. Cheng Y, Tsai H-L, Sugioka K, Midorikawa K (2006) Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining. Appl Phys A Mater Sci Process 85:11–14

5. Chung CK, Hong YZ (2007) Fabrication and analysis of the reflowed microlens arrays using JSR THB-130 N photoresist with different heat treatments [J]. Microsyst Technol 13(5–6):523–530

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 微透镜阵列的制备与应用研究进展;Acta Optica Sinica;2021

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3