Deep sub micron high aspect ratio polymer structures produced by hard X-ray lithography-Reference-Cited by-同舟云学术

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Deep sub micron high aspect ratio polymer structures produced by hard X-ray lithography

Published:2004-10 Issue:6-7 Volume:10 Page:493-497
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsystem Technologies

Author:

Achenbach S.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-004-0379-2.pdf

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Micromanufacturing: A review—Part I;Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture;2014-08-01

2. Beamline BL-07 at Indus-2: a facility for microfabrication research;Journal of Synchrotron Radiation;2013-11-02

3. Microstructured proton-conducting membranes by synchrotron-radiation-induced grafting;Journal of Membrane Science;2008-12-01

4. Fabrication Approaches for Generating Complex Micro- and Nanopatterns on Polymeric Surfaces;Chemical Reviews;2008-02-26

5. Submicron-scale surface acoustic wave resonators fabricated by high aspect ratio X-ray lithography and aluminum lift-off;Microsystem Technologies;2008-02-14

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