Funder
National Natural Science Foundation of China
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Dong L, Tao J, Bao J, Zhao W, Wang G (2016) Anchor loss variation in MEMS Wine-Glass mode disk resonators due to fluctuating fabrication process. IEEE Sens J 16(18):6846–6856
2. Du Q, Pan M, Hu J, Chen D, Hu J, Tian W, Sun K (2018) Quality factor determination and improvement of piezoelectric driving multilayer resonator. J Micromech Microeng 28(9):095005
3. Edelstein AS, Fischer GA (2002) Minimizing 1/f noise in magnetic sensors using a microelectromechanical system flux concentrator. J Appl Phys 91(10):7795–7797
4. Edelstein AS, Fischer GA, Pedersen M, Nowak ER, Cheng SF, Nordman CA (2006a) Progress toward a thousandfold reduction in 1/f noise in magnetic sensors using an ac microelectromechanical system flux concentrator. J Appl Phys 99:08B317
5. Edelstein AS, Fischer GA, Pedersen M, Nowak ER, Cheng SF, Nordman CA (2006) Minimizing 1/f noise in magnetic sensors using an ac MEMS flux concentrator. In: Mater Res Soc Symp Proc 0906-HH03-09:1-13