Arc plasma jet cleaning of the silicon surface before CoSi2/Si contact formation-Reference-Cited by-同舟云学术

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Arc plasma jet cleaning of the silicon surface before CoSi2/Si contact formation

Published:1996-07 Issue:1 Volume:63 Page:9-12
ISSN:0947-8396
Container-title:Applied Physics A Materials Science and Processing
language:en
Short-container-title:Appl. Phys. A

Author:

Pavlov G. Ya.,Pugachevich V. P.,Gromov D. G.,Kudryashova E. B.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/BF01579740.pdf

Reference12 articles.

1. K. Maex: Semicond. Int'l 75 (March 1995)

2. K. Maex: Mater. Sci. Eng. R1 117 (1993)

3. J.T. Beechinor, P.V. Kelly, G.M. O'Connor, G.M. Crean: InProc. 2nd Int'l Symp. on Ultra-clean Processing of Silicon Surfaces (UCPSS'94), Brugge, Belgium (1994) p. 69

4. G. Zou, F. Jonckx, R. Donaton, W. Kuper, K. Maex, P.W. Mertens, M. Meuries, M.M. Heyns, K. Locke, M. Korac, R. Schild: InProc. 2nd Int'l Symp. on Ultra-clean Processing of Silicon Surfaces (UCPSS'94), Brugge, Belgium (1994) p. 177

5. T. Hattori: InProc. 2nd Int'l Symp. on Ultra-clean Processing of Silicon Surfaces (UCPSS'94), Brugge, Belgium (1994) p. 13

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1. Modeling of reactive kinetics in the metal surface contaminant cleaning using atmospheric pressure plasma arc;Applied Surface Science;2008-08

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