Rapid detection of ultra-trace nanoparticles based on ACEK enrichment for semiconductor manufacturing quality control
Author:
Funder
The US NSF CPS/USDA NIFA
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://link.springer.com/article/10.1007/s10404-018-2167-9/fulltext.html
Reference36 articles.
1. Antohe AO et al (2014) Production of EUV mask blanks with low killer defects. Proc SPIE 9048(15):4177–4180
2. Arnold WM, Schwan HP, Zimmermann U (1987) Surface conductance and other properties of latex particles measured by electrorotation. J Phys Chem 91(19):5093–5098
3. Bouhaik IS, Leroy P, Ollivier P, Azaroual M, Mercury L (2013) Influence of surface conductivity on the apparent zeta potential of TiO2, nanoparticles: application to the modeling of their aggregation kinetics. J Colloid Interface Sci 406(2):75–85
4. Castellanos A, Ramos A, González A, Green NG, Morgan H (2003) Electrohydrodynamics and dielectrophoresis in microsystems: scaling laws. J Phys D Appl Phys 36(20):2584–2597
5. Cheng C et al (2016) Bisphenol-a sensors on polyimide fabricated by laser direct writing for on-site river water monitoring at attomolar concentration. ACS Appl Mater Interfaces 8(28):17784–17792
Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Microscale damper prototype: A preliminary study on suppressing air flow oscillations within microchannels;Journal of Physics: Conference Series;2024-01-01
2. Recent advances in microfluidic fiber‐spinning chemistry;Journal of Polymer Science;2023-10-11
3. A Machine Learning Approach for Improving Wafer Acceptance Testing Based on an Analysis of Station and Equipment Combinations;Mathematics;2023-03-23
4. A disposable aptasensor based on a gold-plated coplanar electrode array for on-site and real-time determination of Cu2+;Analytica Chimica Acta;2021-10
5. A Sensitive and Specific Genomic RNA Sensor for Point-of-Care Screening of Zika Virus from Serum;Analytical Chemistry;2021-08-11
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3