The removal of surface silica and its effect on the nitridation of high-purity silicon
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
http://link.springer.com/content/pdf/10.1007/BF02403125.pdf
Reference9 articles.
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5. M. N. Rahaman andA. J. Moulson,ibid. 16 (1981) 2319.
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