Quantitative XPS-analysis of tantalum-containing amorphous carbon films

Author:

Grischke M.,Brauer A.,Benndorf C.,Thieme F.,Willich P.

Publisher

Springer Science and Business Media LLC

Subject

Clinical Biochemistry,General Materials Science,General Medicine,Analytical Chemistry

Reference14 articles.

1. Willich P (1986) Proc 11th Int Congress of x-Ray Optics and Microanalysis. Faculty of Engineering Science, University of W. Ontario, London (W. Ontario), Canada

2. Dimigen H, Hübsch H, Memming R (1987) Appl Phys Lett 50:1056–1058

3. Enke K, Dimigen H, Hübsch H (1980) Appl Phys Lett 34:291–292

4. Dimigen H, Hübsch H (1983/84) Philips Tech Rev 41:186–197

5. Benndorf C, Grischke M, Brauer A, Köberle H, Memming R, Thieme F (1987) Proc Int Symp on Trends and New Applications in Thin Films. Suppl of Les Vide, les Couches Minces 234:485

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2. Stoichiometry of a-C:H(Ta) films determined by means of RBS and the 15N technique;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-04

3. Surface activation of polytetrafluoroethylene by bonding of polymeric silicic acid;Journal of Applied Polymer Science;1993-11-10

4. Atomic Spectrometry Update—Atomisation and Excitation;J. Anal. At. Spectrom.;1990

5. Atomic Spectrometry Update—References;J. Anal. At. Spectrom.;1990

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