Surface and thin film analysis in silicon technology: actual and future problems and demands-Reference-Cited by-同舟云学术

Surface and thin film analysis in silicon technology: actual and future problems and demands

Published:1989-01 Issue:4-5 Volume:333 Page:561-568
ISSN:0016-1152
Container-title:Fresenius' Zeitschrift für analytische Chemie
language:en
Short-container-title:Z. Anal. Chem.

Author:

Kolbesen B. O.,Pamler W.

Publisher

Springer Science and Business Media LLC

Subject

Clinical Biochemistry,General Materials Science,General Medicine,Analytical Chemistry

Link

http://link.springer.com/content/pdf/10.1007/BF00572377.pdf

Reference42 articles.

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5. Mühlhoff HM, Murkin P, Küsters KH, Orlowski M, Müller W (1987) Proc 1st Int Symp on Ultralarge Scale Integration Science and Technology, Electrochem Soc 87-11:632

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