On the influence of reactive gases on sputtering and secondary ion emission

Author:

Hofer W. O.,Martin P. J.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry,General Engineering

Cited by 59 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Beryllium as the plasma-facing material in fusion energy systems—experiments, evaluation, and comparison with alternative materials;Fusion Engineering and Design;1997-11

2. Sputtering yields of nickel and chromium;Applied Physics A Solids and Surfaces;1989-12

3. Light-Ion sputtering yield measurements of Ti AND TiC under O2 exposure at high temperature;Journal of Nuclear Materials;1989-04

4. Study of modification processes in sputtering during oxygen exposure;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-03

5. On the surface modification of oxygen‐exposed molybdenum during sputtering;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1988-07

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