1. S. Poston and A. Reisman, J. Electron Mater.17, 57 (1988).
2. M. M. Oprysko, M. Beranek, A. Titus, and D. Ewbank, Semi- cond. Inter.1, 92 (1986).
3. A. Serafino, R. Coyle, G. Wolk, and R. Doll, Semicond. Inter.6, 132 (1988).
4. Handbook of Chemistry and Physics, 67th edition, 1986-87.
5. I. Yoshida, Y. Oono, H. Kobayashi, and K. Ueno, Bull. Chem. Soc. Jpn.45, 174 (1972).