A wide band gap phononic crystal strip for quality factor improvement in a length extensional mode MEMS resonator
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering
Link
https://link.springer.com/content/pdf/10.1007/s00419-022-02125-1.pdf
Reference36 articles.
1. Lin, C.M., Hsu, J.C., Senesky, D.G., Pisano, A.P.: Anchor loss reduction in ALN lamb wave resonators using phononic crystal strip tethers. In: IEEE International Frequency Control Symposium (FCS), pp. 1–5 (2014)
2. Khelif, A., Aoubiza, B., Mohammadi, S., Adibi, A., Laude, V.: Complete band gaps in two dimensional phononic crystal slabs. Phys. Rev. E 74
3. Konstantopoulou, A., Aravantinos-Zafiris, N., Sigalas, M.M.: Tunable bandgaps and defect states in 3d phononic hollow structures. J. Appl. Phys. 127
4. Coffy, E., Euphrasie, S., Addouche, M., Vairac, P., Khelif, A.: Evidence of a broadband gap in a phononic crystal strip. Ultrasonics 78, 51–56 (2017)
5. Feng, D., Xu, D., Wu, G., Xiong, B., Wang, Y.: Phononic crystal strip based anchors for reducing anchor loss of micromechanical resonators. J. Appl. Phys. 115
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