Models for analyzing squeeze film air damping depending on oscillation modes of micro/nano beam resonators
Author:
Funder
National Foundation for Science and Technology Development
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering
Link
https://link.springer.com/content/pdf/10.1007/s00419-020-01775-3.pdf
Reference34 articles.
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4. Xu, Y., Lin, J.T., Alphenaar, B.W., Keynton, R.S.: Viscous damping of microresonators for gas composition analysis. Appl. Phys. Lett. 88(14), 143513 (2006). https://doi.org/10.1063/1.2193347
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