Publisher
Springer Fachmedien Wiesbaden
Reference6 articles.
1. Köhler, M.: Etching in Microsystem Technology. Wiley-VCH, Weinheim (1999)
2. Ruge, I.: Halbleiter-Technologie, Series Halbleiter-Elektronik, vol. 4. Springer, Berlin (1984)
3. Yoo, C.S.: Semiconductor Manufacturing Technology, pp. 378 ff. World Scientific Publishing, Singapore (2008)
4. Tsujimura, M.: Processing tools for manufacturing. In: Li, Y. (Hrsg.) Microelectronic Applications of Chemical Mechanical Planarization, pp. 57 ff. Wiley, Hoboken (2008)
5. Yoo, C.S.: Semiconductor Manufacturing Technology, pp. 400 ff. World Scientific Publishing, Singapore, (2008)