Microstructural analysis of a Au/Pt/Pd/Zn ohmic contact to an AlGaAs/GaAs heterojunction bipolar transistor-Reference-Cited by-同舟云学术

Microstructural analysis of a Au/Pt/Pd/Zn ohmic contact to an AlGaAs/GaAs heterojunction bipolar transistor

Published:1996-09 Issue:9 Volume:25 Page:1478-1486
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:JEM

Author:

Jian P.,Ivey D. G.,Eicher S.,Lester T. P.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/BF02655387.pdf

Reference25 articles.

1. E.D. Marshall and M. Murakami,Contacts to Semiconductors: Fundamentals and Technology, ed. L.J. Brillson, (Park Ridge, NJ: Noyes Publications, 1993), p. 1.

2. B. Péoz, R. Vereseggyházy, I. Mojzes, G. Radóczi, A. Sulyok and V. Malina,Mat. Res. Soc. Symp. Proc., 181, (Pittsburgh, PA: Mater. Res. Soc., 1990), p. 319.

3. T.S. Kalkur, Y.C. Lu and C. Araujo,Met. Trans. A 21A, 2459 (1990).

4. D.H. Ko and R. Sinclair,Mater. Res. Soc. Symp. Proc, 181, (Pittsburgh, PA: Mater. Res. Soc., 1990), p. 333.

5. M.W. Cole, W.Y. Han, L.M. Casas, D.W. Eckart and K.A. Jones,J. Vac. Sci. Technol. A 12, 1904 (1994).

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