Author:
Yu Suzhu,Wong Terence K. S.,Hu Xiao,Yong Ming Shyan
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Condensed Matter Physics,Biomaterials,General Chemistry,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. The National Technology Roadmap for Semiconductors, Semiconductor Industry Association (2002) 75.
2. R. Rosenberg, D.C. Edelstein, C.K. Hu, and K.P. Rodbell, Annu. Rev. Mater. Sci. 30, 229 (2000).
3. C. Steinbruche and B.L. Chin, Copper Interconnect Technology, Bellingham, WA: SPIE Optical Engineering Press (2001).
4. P.S. Ho, J. Leu, and W.W. Lee, (Eds.), Low Dielectric Constant Materials for IC Applications, Springer-Verlag Berlin Heidelberg (2003).
5. S. Sivoththaman, R. Jeyakumar, L. Ren, and A. Nathan, J. Vac. Sci. Technol. A 20, 1149 (2002).
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