Funder
National Foundation for Science and Technology Development
Publisher
Springer Science and Business Media LLC
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference24 articles.
1. Fericean, S., Droxler, R.: New noncontacting inductive analog proximity and inductive linear displacement sensors for industrial automation. IEEE Sens. J. 7(11), 1538–1545 (2007). https://doi.org/10.1109/JSEN.2007.908232
2. Vicary, J.A., Miles, M.J.: Pushing the boundaries of local oxidation nanolithography: short timescales and high speeds. Ultramicroscopy 108(10), 1120–1123 (2008). https://doi.org/10.1016/j.ultramic.2008.04.061
3. Zhang, Z., et al.: A new laser displacement sensor based on triangulation for gauge real-time measurement. Opt. Laser Technol. 40(2), 252–255 (2008). https://doi.org/10.1016/j.optlastec.2007.04.009
4. Fleming, A.J.: A review of nanometer resolution position sensors: operation and performance. Sens. Actuators A 190, 106–126 (2013). https://doi.org/10.1016/j.sna.2012.10.016
5. A linear differential inductive displacement sensor with dual planar coils | IEEE Journals & Magazine | IEEE Xplore. https://ieeexplore.ieee.org/document/8502140. Accessed 14 Jul 2022
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献