Author:
Fu Xiaorui,Zhang Ming,Hou Dezhi,Li Chong
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Reference20 articles.
1. P. Li et al., Resonating frequency of a SAD circuit loop and inner microcantilever in a gas sensor, IEEE Sensors Journal, 10(2) (2010) 316–320.
2. P. Singh and R. D. S. Yadava, Effect of surface stress on resonance frequency of microcantilever sensors, IEEE Sensors Journal, 18(18) (2018) 1–1.
3. P. Yang, B. Chen and X. Wen, A novel MEMS chip-based atmospheric electric field sensor for lightning hazard warning applications, Sensors, IEEE Sensors (2015) 398–401.
4. W. Yuan, A review of silicon micromachined resonant pressure sensor, Journal of Mechanical Engineering, 49(20) (2013) 2–9.
5. Y. Zheng, Research progress and application prospect of smart sensor technology, Science and Technology Review, 34 (2016) 72–78.
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献