Development of digital lithography masking method with focusing mechanism for fabrication of micro-feature on biomachining process

Author:

Saragih Agung Shamsuddin,Ko Tae Jo

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials

Reference10 articles.

1. L. Alting, F. Kimura, H. Hansen and G. Bissacco, Micro engineering, CIRP Annals — Manufacturing Technology, 52(2) (2003) 635–657.

2. J. Istiyanto, A. S. Saragih and T. J. Ko, Metal based microfeature fabrication using biomachining process, Microelectronic Engineering, Jul. (2012).

3. W. Oldham, Mirror-based pattern generation for maskless lithography, Microelectronic Engineering, 73–74 (2004) 42–47, Jun.

4. R. Menon, A. Patel, D. Chao and M. Walsh, Zone-platearray lithography (ZPAL): optical maskless lithography for cost-effective patterning, in Proc. SPIE 5751, (2005) 330–339.

5. C. Sun, N. Fang and D. Wu, Projection microstereolithography using digital micro-mirror dynamic mask, Sensors and Actuators A: Physical, 121(1) (2005) 113–120.

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