Analytical closed form model for static pull-in analysis in electrostatically actuated torsional micromirrors

Author:

Moeenfard Hamid,Ahmadian Mohammad Taghi

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials

Reference21 articles.

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2. P. C. P. Chao, C. W. Chiu and C. Y. Tsai, A novel method to predict the pull-in voltage in a closed form for micro-plates actuated by a distributed electrostatic force, Journal of Micromechanics and Microengineering, 16 (2006) 986–998.

3. S. Beeby, G. Ensell, M. Kraft and N. White, MEMS mechanical sensors. Boston: Artech House (2004).

4. L. J. Hornbeck, 128×128 deformable mirror device, Electron Devices, IEEE Transactions on, 30 (1983) 539–545.

5. R. S. Muller and K. Y. Lau, Surface-micromachined microoptical elements and systems, Proceedings of the IEEE, 86 (1998) 1705–1720.

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