Author:
Jeong Jae-heon,Ahn Dahoon,Kim Kihyun,Choi Young-Man,Kim MyeongHyeon,Lee Hak Jun,Park Jaehyun,Kim Hyunjun,Ryu Jiheun,Kim HyoYoung,Gweon Dae-Gab
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Reference14 articles.
1. H. P. Syahputra, T. J. Ko and B. M. Chung, Development of 2-axis hybrid positioning system for precision contouring on micro-milling operation, Journal of Mechanical Science and Technology, 28 (2) (2014) 691–697.
2. M. H. Kim, J. H. Jeong, H. Y. Kim and D. G. Gweon, A sixdegree-of-freedom magnetic levitation fine stage for a highprecision and high-acceleration dual-servo stage, Smart Materials and Structures, 24 (2015) 13.
3. W. J. Kim et al., Linear motor-levitated stage for photolithography, CIRP Annals, Manufacturing Technology, 46 (1) (1997) 447–450.
4. J. W. Jansen et al., Magnetically levitated planar actuator with moving magnets, IEEE Transactions on Industry, 44 (4) (2008) 1108–1115.
5. W. J. Kim, High-precision planar magnetic levitation, Thesis (Ph.D.), Massachusetts Institute of Technology, Source DAI-B 58/12 (1997) 6730.
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献