Iterative tuning of decoupling controller for 3-DOF precision motion stage
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Link
http://link.springer.com/content/pdf/10.1007/s12206-011-1104-6.pdf
Reference14 articles.
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4. Y. M. Li and Q. S. Xu, A totally decoupled piezo-driven XYZ flexure parallel micropositioning stage for micro/nanomanipulation, IEEE Transaction on Automation Science and Engineering, 8(2) (2011) 265–279.
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