2/3-D process and device simulation. An effective tool for better understanding of internal behavior of semiconductor structures

Author:

Donoval Daniel,Vrbicky Andrej,Chvala Ales,Beno Peter

Publisher

Springer Netherlands

Reference33 articles.

1. Moore, G. E. “Progress in digital integrated electronics”, IEDM Tech. Digest, 1975, 11-13.

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4. http://www.silvaco.com/products/interactive_tools/vwf.html

5. Lee, K.; Shur, M.; Ejeldly, T. A.;Ytterdal, T. Semiconductor Device Modeling for VLSI. Englewood Cliffs: Prentice Hall, 1993.

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